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Sure K. Ngo
Dublin, CA
US
2 patents
3 Patents
US12119223
2024
Single Precursor Low-k Film Deposition and UV Cure for Advanced Technology Node
Applied Materials, Inc.
0 cites
US11600486
2023
Systems and Methods for Depositing Low-κdielectric Films
Applied Materials, Inc.
0 cites
US11572622
2023
Systems and Methods for Cleaning Low-k Deposition Chambers
Applied Materials, Inc.
0 cites