Patents/Inventors

Surajit Kumar

San Jose, CAUS7 patents

5 Patents

US125936432026
Batch Thermal Process Chamber
Applied Materials, Inc.
0 cites
US125281512026
Gas Entrainment During Jetting of Fluid for Temperature Control in Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites
US119191232024
Apparatus and Method for CMP Temperature Control
Applied Materials, Inc.
0 cites
US117696842023
Wafer Heater with Backside and Integrated Bevel Purge
Applied Materials, Inc.
0 cites
US115773582023
Gas Entrainment During Jetting of Fluid for Temperature Control in Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites