Sunil Srinivasan

5 Patents

• US124566112025

  Systems and Methods for Controlling a Voltage Waveform at a Substrate During Plasma Processing

  APPLIED MATERIALS, Inc.

  0 cites
• US122550552025

  Integrated Cleaning Process for Substrate Etching

  Applied Materials, Inc.

  0 cites
• US122371492025

  Reducing Aspect Ratio Dependent Etch with Direct Current Bias Pulsing

  Applied Materials, Inc.

  0 cites
• US120947522024

  Wafer Edge Ring Lifting Solution

  Applied Materials, Inc.

  0 cites
• US119962942024

  Cryogenic Atomic Layer Etch with Noble Gases

  APPLIED MATERIALS, Inc.

  0 cites