Patents/Inventors

Sunil Kapoor

Vancouver, WAUS15 patents

15 Patents

US125867572026
Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
Lam Research Corporation
0 cites
US124013382025
Multiple-output Radiofrequency Matching Module and Associated Methods
Lam Research Corporation
0 cites
US123945982025
Capacitance Measurement Without Disconnecting from High Power Circuit
Lam Research Corporation
0 cites
US123225822025
Anomalous Plasma Event Detection and Mitigation in Semiconductor Processing
Lam Research Corporation
0 cites
US122057962025
Radio Frequency Power Generator Having Multiple Output Ports
Lam Research Corporation
0 cites
US121761892024
Early Warning Systems and Methods for Determining Capacitor Failures
Lam Research Corporation
0 cites
US121430872024
Combiner and Distributor for Adjusting Impedances or Power Across Multiple Plasma Processing Stations
LAM RESEARCH CORPORATION
0 cites
US120516302024
RF Current Measurement in Semiconductor Processing Tool
Lam Research Corporation
0 cites
US120520062024
Mutually Induced Filters
Lam Research Corporation
0 cites
US120407702024
Multiple-output Radiofrequency Matching Module and Associated Methods
Lam Research Corporation
0 cites
US119945422024
RF Signal Parameter Measurement in an Integrated Circuit Fabrication Chamber
Lam Research Corporation
0 cites
US118813812024
Capacitance Measurement Without Disconnecting from High Power Circuit
Lam Research Corporation
0 cites
US118239282023
Control of Wafer Bow in Multiple Stations
Lam Research Corporation
0 cites
US117840272023
Apparatuses and Methods for Avoiding Electrical Breakdown from RF Terminal to Adjacent Non-rf Terminal
Lam Research Corporation
0 cites
US115943972023
Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
Lam Research Corporation
0 cites