Patents/Inventors

Sungyong Lim

Suwon-siKR12 patents

11 Patents

US125557572026
Semiconductor Equipment Monitoring Apparatus, and Semiconductor Equipment Including the Semiconductor Equipment Monitoring Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US125506722026
Susceptor and Manufacturing Method Therefor
Mico Ceramics Ltd.
0 cites
US124244122025
Apparatus for Providing RF Power and Operating Method Thereof
Samsung Electronics Co., Ltd.
0 cites
US123680222025
RF Generating Device and Semiconductor Manufacturing Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122886742025
Hybrid Matcher and Radio Frequency Matching System Including the Hybrid Matcher
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US121256872024
System of Semiconductor Process and Control Method Thereof
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US121051322024
Electric Field Measuring Apparatus and Method of Measuring Electric Field Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US120149052024
Apparatus and Method Fabricating Semiconductor Device
Samsung Electronics Co., Ltd.
0 cites
US119962752024
Device for Radical Diagnostic in Plasma Processing Chamber, Radical Diagnostic System Having the Same, and Operating Method Thereof
Samsung Electronics Co., Ltd.
0 cites
US117987882023
Hollow Cathode, an Apparatus Including a Hollow Cathode for Manufacturing a Semiconductor Device, and a Method of Manufacturing a Semiconductor Device Using a Hollow Cathode
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117804272023
Apparatus for Assisting Driving and Method Thereof
HL KLEMOVE Corp.
0 cites