Patents/Inventors

Sungsil Cho

Anyang-siKR3 patents

4 Patents

US123476722025
Silicon Precursor Compounds and Method for Forming Silicon-containing Films
ENTEGRIS, Inc.
0 cites
US122643922025
Silicon Precursor Compounds and Method for Forming Silicon-containing Films
ENTEGRIS, Inc.
0 cites
US120716882024
Precursors and Methods for Preparing Silicon-containing Films
ENTEGRIS, Inc.
0 cites
US120376812024
Method for Forming Carbon Rich Silicon-containing Films
ENTEGRIS, Inc.
0 cites