Patents/Inventors

Sunghyup Kim

Suwon-siKR11 patents

11 Patents

US122986762025
Substrate Processing Apparatus
Samsung Electronics Co., Ltd.
0 cites
US121702332024
Plasma Treatment Apparatus, a Method of Monitoring a Process of Manufacturing a Semiconductor Device by Using the Same, and a Method of Manufacturing a Semiconductor Device Including the Monitoring Method
Samsung Electronics Co., Ltd.
0 cites
US118529842023
Target Debris Collection Device and Extreme Ultraviolet Light Source Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US118483012023
Method of Manufacturing a Semiconductor Package
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US118375732023
Chip Bonding Apparatus and Method of Manufacturing Semiconductor Device Using the Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117200272023
Apparatus for Generating Extreme Ultraviolet Light and Lithography Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117118832023
Droplet Accelerating Assembly and Extreme Ultra-violet Lithography Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US116985902023
Collector Mirror and Apparatus for Creating Extreme Ultraviolet Light Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US116263812023
Bonding Head Including a Thermal Compensator, Die Bonding Apparatus Including the Same and Method of Manufacturing Semiconductor Package Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US116077412023
Semiconductor Chip Bonding Apparatus Including Head Having Thermally Conductive Materials
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US115990312023
Target Debris Collection Device and Extreme Ultraviolet Light Source Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites