12 Patents
- US125605322026Apparatus for Measuring Radical Density Distribution Based on Light Absorption and Operating Method Thereof
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US125575872026Apparatus and Method Monitoring Semiconductor Manufacturing Equipment
Samsung Electronics Co., Ltd.
0 cites - 0 cites
- US124943522025Plasma Confinement Ring, Semiconductor Manufacturing Apparatus Including the Same, and Method of Manufacturing a Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - 0 cites
- US124313412025Apparatus for Arcing Diagnosis, Plasma Process Equipment Including the Same, and Arcing Diagnosis Method
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - 0 cites
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- US123133932025Level Sensor and Substrate Processing Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US118989122024Hyperspectral Imaging (HSI) Apparatus and Inspection Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - 0 cites
- US116762632023Extreme Ultraviolet (EUV) Collector Inspection Apparatus and Method
SAMSUNG ELECTRONICS CO., Ltd.
0 cites