4 Patents
- US125605322026Apparatus for Measuring Radical Density Distribution Based on Light Absorption and Operating Method Thereof
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US122939012025Substrate Processing Apparatus Including Shower Head and Edge Ring and Related Methods of Manufacturing Semiconductor Devices
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US119903482024Wafer Processing Apparatus and Wafer Processing Method Using the Same
Samsung Electronics Co., Ltd.
0 cites - US117987882023Hollow Cathode, an Apparatus Including a Hollow Cathode for Manufacturing a Semiconductor Device, and a Method of Manufacturing a Semiconductor Device Using a Hollow Cathode
SAMSUNG ELECTRONICS CO., Ltd.
0 cites