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Inventors
Sung Hyup Kim
Hwaseong-si
KR
3 patents
2 Patents
US12513810
2025
EUV Generator, EUV Lithography Apparatus Including the Same, and Method for Fabricating Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US12199014
2025
Semiconductor Device and a Manufacturing Method Thereof
SAMSUNG ELECTRONICS CO., Ltd.
0 cites