Patents/Inventors

Sung Hun Eom

Hwaseong-siKR5 patents

4 Patents

US125663872026
Buffer Unit and Substrate Treating Apparatus Including the Same
Semes Co., Ltd.
0 cites
US125411502026
Substrate Processing Apparatus and Method Thereof
SEMES CO., Ltd.
0 cites
US119643092024
Substrate Treatment Apparatus and Method
SEMES CO., Ltd.
0 cites
US119655972024
Piston Assembly, Air Cylinder and Apparatus for Processing Substrate
SEMES CO., Ltd.
0 cites