Patents/Inventors

Sung Duk Son

Gyeonggi-doKR3 patents

4 Patents

US123343802025
Boat Transfer Method and Heat Treatment Apparatus
Tokyo Electron Limited
0 cites
US120183662024
Substrate Processing Apparatus and Cleaning Method
Tokyo Electron Limited
0 cites
US117869462023
Cleaning Method and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117252812023
Gas Introduction Structure, Thermal Processing Apparatus and Gas Supply Method
TOKYO ELECTRON LIMITED
0 cites