Patents/Inventors

Sunao Egashira

TokyoJP3 patents

3 Patents

US119677502024
Wilkinson-type Combiner and RF Generator
HITACHI KOKUSAI ELECTRIC Inc.
0 cites
US119011592024
RF Generator Device and Substrate Processing Apparatus
HITACHI KOKUSAI ELECTRIC Inc.
0 cites
US118107592023
RF Generator
HITACHI KOKUSAI ELECTRIC Inc.
0 cites