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Sun Yong Park
Cheonan-si
KR
1 patent
2 Patents
US12224189
2025
Substrate Type Sensor and Method of Measuring the Impact Point and the Impact Force of Chemical
SEMES CO., Ltd.
0 cites
US11933808
2024
Buffer Unit and Method for Storaging Substrate Type Sensor for Measuring of Horizontality of a Substrate Support Member Provided on a Temperature Varying Atmosphere
SEMES CO., Ltd.
0 cites