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Inventors
Sumit Subhash Patankar
Fremont, CA
US
6 patents
7 Patents
US12459080
2025
Cleaning System for Polishing Liquid Delivery Arm
Applied Materials, Inc.
0 cites
US12240078
2025
Cleaning System for Polishing Liquid Delivery Arm
Applied Materials, Inc.
0 cites
US12134167
2024
Pad Conditioner Cleaning System
Applied Materials, Inc.
0 cites
US11986925
2024
Maintenance Methods for Polishing Systems and Articles Related Thereto
APPLIED MATERIALS, Inc.
0 cites
US11756804
2023
Platen Shield Cleaning System
Applied Materials, Inc.
0 cites
US11648645
2023
Pad Conditioner Cleaning System
Applied Materials, Inc.
0 cites
US11545371
2023
Platen Shield Cleaning System
Applied Materials, Inc.
0 cites