8 Patents
- 0 cites
- US124313402025Exhaust Gas Processing Apparatus Having Plasma Source and Substrate Processing Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US124094042025Scrubber System and Wet Cleaning Method Using the Same
Global Standard Technology Co., Ltd
0 cites - US123907632025Apparatus Trapping an Exhaust Material from a Substrate-processing Process and Apparatus for Processing a Substrate Including the Trapping Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - 0 cites
- US117382992023Exhaust Gas Processing System Including Adsorbent for Suppressing Powder-like Byproduct
Puresphere Co., Ltd.
0 cites - US116605632023Apparatus for Collecting By-product and Method for Collecting By-product
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US115491782023Apparatus for Treating Semiconductor Process Gas and Method of Treating Semiconductor Process Gas
Puresphere Co., Ltd.
0 cites