Suguru Sato

7 Patents

• US124630212025

  Substrate Processing Apparatus and Maintenance Method for Substrate Processing Apparatus

  TOKYO ELECTRON LIMITED

  0 cites
• US124244232025

  Substrate Processing Apparatus

  TOKYO ELECTRON LIMITED

  0 cites
• US123775032025

  Part Replacement System and Part Replacement Device

  TOKYO ELECTRON LIMITED

  0 cites
• US123476602025

  Substrate Processing Apparatus, Substrate Processing System, and Maintenance Method

  TOKYO ELECTRON LIMITED

  0 cites
• US120401662024

  Substrate Processing Apparatus, Substrate Processing System, and Maintenance Method

  TOKYO ELECTRON LIMITED

  0 cites
• US120026662024

  Measuring Device, Measuring Method, and Vacuum Processing Apparatus

  TOKYO ELECTRON LIMITED

  0 cites
• US119929122024

  Part Replacement System and Part Replacement Device

  TOKYO ELECTRON LIMITED

  0 cites