Patents/Inventors

Sudeep Pallikkara Kuttiatoor

Naperville, ILUS2 patents

2 Patents

US125289732026
Composition and Method for Silicon Oxide and Carbon Doped Silicon Oxide CMP
CMC Materials LLC
0 cites
US121165022024
Self-stopping Polishing Composition and Method for High Topological Selectivity
CMC Materials LLC
0 cites