Patents/Inventors

Subhadeep Kal

Albany, NYUS13 patents

12 Patents

US125936342026
Selective Gas Phase Etch of Silicon Germanium Alloys
TOKYO ELECTRON LIMITED
0 cites
US125686512026
Semiconductor Structure Having Stacked Gates and Method of Manufacture Thereof
Tokyo Electron Limited
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US125686772026
Method of Self-aligned Dielectric Wall Formation for Forksheet Application
Tokyo Electron Limited
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US125123272025
Surface Modification to Achieve Selective Isotropic Etch
Tokyo Electron Limited
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US124446142025
Etch Selectivity Modulation by Fluorocarbon Treatment
Tokyo Electron Limited
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US123362742025
Self-aligned Method for Vertical Recess for 3D Device Integration
Tokyo Electron Limited
0 cites
US122725582025
Selective and Isotropic Etch of Silicon Over Silicon-germanium Alloys and Dielectrics; via New Chemistry and Surface Modification
Tokyo Electron Limited
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US122610532025
Substrate Processing with Selective Etching
Tokyo Electron Limited
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US122610542025
Substrate Processing with Material Modification and Removal
Tokyo Electron Limited
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US117156432023
Gas Phase Etch with Controllable Etch Selectivity of Metals
TOKYO ELECTRON LIMITED
0 cites
US116316712023
3D Complementary Metal Oxide Semiconductor (CMOS) Device and Method of Forming the Same
Tokyo Electron Limited
0 cites
US115574792023
Methods for EUV Inverse Patterning in Processing of Microelectronic Workpieces
TOKYO ELECTRON LIMITED
0 cites