Patents/Inventors

Su Hyung Lee

Hwaseong-siKR2 patents

3 Patents

US123157082025
Apparatus for Treating Substrate
SEMES CO., Ltd.
0 cites
US121815042024
Apparatus and Method for Inspecting Electrostatic Chuck
SEMES CO., Ltd.
0 cites
US119674912024
Method and Apparatus for Parts Cleaning
SEMES CO., Ltd.
0 cites