Patents/Inventors

Stilian Pandev

Santa Clara, CAUS8 patents

9 Patents

US125717242026
Single Wafer Orientation Tool-induced Shift Cleaning
KLA Corporation
0 cites
US124223762025
Imaging Reflectometry for Inline Screening
KLA Corporation
0 cites
US121812712024
Estimating In-die Overlay with Tool Induced Shift Correction
KLA CORPORATION
0 cites
US121486392024
Correcting Target Locations for Temperature in Semiconductor Applications
KLA Corp.
0 cites
US118801422024
Self-calibrating Overlay Metrology
KLA Corporation
0 cites
US117963902023
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic Metrology
KLA Corporation
0 cites
US117840972023
Measurement of Overlay Error Using Device Inspection System
KLA-TENCOR CORPORATION
0 cites
US116040632023
Self-calibrated Overlay Metrology Using a Skew Training Sample
KLA Corporation
0 cites
US116044202023
Self-calibrating Overlay Metrology
KLA Corporation
0 cites