Patents/Inventors

Steven M. Bilodeau

Fairfield, CTUS6 patents

5 Patents

US125954132026
Silicon Nitride Etching Compositions and Method
ENTEGRIS, Inc.
0 cites
US123004982025
Formulations to Selectively Etch Silicon-germanium Relative to Silicon
ENTEGRIS, Inc.
0 cites
US120125402024
Compositions and Methods for Selectively Etching Silicon Nitride Films
ENTEGRIS, Inc.
0 cites
US118759972024
Formulations to Selectively Etch Silicon-germanium Relative to Silicon
ENTEGRIS, Inc.
0 cites
US117810662023
Wet Etching Composition and Method
ENTEGRIS, Inc.
0 cites