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Inventors
Steven M. Anella
West Newbury, MA
US
2 patents
3 Patents
US11875967
2024
System Apparatus and Method for Enhancing Electrical Clamping of Substrates Using Photo-illumination
Applied Materials, Inc.
0 cites
US11651986
2023
System for Isolating Electrodes at Cryogenic Temperatures
Applied Materials, Inc.
0 cites
US11557496
2023
Load Lock with Integrated Features
Applied Materials, Inc.
0 cites