5 Patents
- US122042462025Metal Oxide Resist Patterning with Electrical Field Guided Post-exposure Bake
Applied Materials, Inc.
0 cites - 0 cites
- US118801372024Film Structure for Electric Field Guided Photoresist Patterning Process
Applied Materials, Inc.
0 cites - 0 cites
- US116505062023Film Structure for Electric Field Guided Photoresist Patterning Process
Applied Materials Inc.
0 cites