Patents/Inventors

Steven E. Babayan

Los Altos, CAUS11 patents

10 Patents

US125623532026
Replaceable Electrostatic Chuck Outer Ring for Edge Arcing Mitigation
Applied Materials, Inc.
0 cites
US124068652025
Substrate Carrier with Array of Independently Controllable Heater Elements
Applied Materials, Inc.
0 cites
US123343852025
Tunable Temperature Controlled Substrate Support Assembly
Applied Materials, Inc.
0 cites
US120947522024
Wafer Edge Ring Lifting Solution
Applied Materials, Inc.
0 cites
US120092442024
Tunable Temperature Controlled Substrate Support Assembly
Applied Materials, Inc.
0 cites
US118878792024
In-situ Apparatus for Semiconductor Process Module
Applied Materials, Inc.
0 cites
US117354012023
In-situ Optical Chamber Surface and Process Sensor
Applied Materials, Inc.
0 cites
US117215692023
Method and Apparatus for Determining a Position of a Ring Within a Process Kit
0 cites
US116224192023
Azimuthally Tunable Multi-zone Electrostatic Chuck
Applied Materials, Inc.
0 cites
US115691142023
Semiconductor Processing with Cooled Electrostatic Chuck
Applied Materials, Inc.
0 cites