Patents/Inventors

Steven Donnell

Burlington, MAUS4 patents

5 Patents

US125001092025
Electrostatic Chuck That Includes Upper Ceramic Layer That Includes a Dielectric Layer, and Related Methods and Structures
ENTEGRIS, Inc.
0 cites
US124446362025
Electrostatic Chuck with a Charge Dissipation Structure
ENTEGRIS, Inc.
0 cites
US118374922023
Electrostatic Chuck Having a Gas Flow Feature, and Related Methods
ENTEGRIS, Inc.
0 cites
US117427812023
Electrostatic Chuck with Charge Dissipation Coating
ENTEGRIS, Inc.
0 cites
US116129722023
Electrostatic Chuck with Embossments That Comprise Diamond-like Carbon and Deposited Silicon-based Material, and Related Methods
ENTEGRIS, Inc.
0 cites