Patents/Inventors

Stephen Roux

New Fairfield, CTUS10 patents

10 Patents

US125852012026
Metrology Mark Structure and Method of Determining Metrology Mark Structure
ASML NETHERLANDS B.V.
0 cites
US123990002025
Systems and Methods for Measuring Intensity in a Lithographic Alignment Apparatus
ASML Holding N.V.
0 cites
US122982572025
Monolithic Particle Inspection Device
ASML Netherlands B.V.
0 cites
US122875912025
Lithographic Apparatus, Metrology Systems, and Methods Thereof
ASML Netherlands B.V. & ASML Holding N.V.
0 cites
US122164142025
Self-referencing Integrated Alignment Sensor
ASML Holding N.V.
0 cites
US121408722024
Optical Designs of Miniaturized Overlay Measurement System
ASML Holding N.V.
0 cites
US121355052024
Spectrometric Metrology Systems Based on Multimode Interference and Lithographic Apparatus
ASML Holding N.V.
0 cites
US120667622024
On Chip Sensor for Wafer Overlay Measurement
ASML Holding N.V. & ASML Netherlands B.V.
0 cites
US119948082024
Lithographic Apparatus, Metrology Systems, Phased Array Illumination Sources and Methods Thereof
ASML Holding N.V.
0 cites
US119661692024
Lithographic Apparatus, Metrology Systems, Phased Array Illumination Sources and Methods Thereof
ASML Holding N.V.
0 cites