Patents/Inventors

Stephen E. Savas

Pleasanton, CAUS12 patents

11 Patents

US125623422026
Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential
Mattson Technology, Inc.
0 cites
US125059842025
Pulsing Control Match Network and Generator
COMET TECHNOLOGIES USA, Inc.
0 cites
US123476772025
Enhanced Ignition in Inductively Coupled Plasmas for Workpiece Processing
Mattson Technology, Inc.
0 cites
US122725322025
Inductive Broad-band Sensors for Electromagnetic Waves
COMET TECHNOLOGIES USA, Inc.
0 cites
US120273512024
Plasma Non-uniformity Detection
COMET TECHNOLOGIES USA, Inc.
0 cites
US120026522024
Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential
Beijing E-town Semiconductor Technology Co., Ltd.
0 cites
US118878202024
Sector Shunts for Plasma-based Wafer Processing Systems
COMET TECHNOLOGIES USA, Inc.
0 cites
US118482042023
Enhanced Ignition in Inductively Coupled Plasmas for Workpiece Processing
Mattson Technology, Inc.
0 cites
US118307082023
Inductive Broad-band Sensors for Electromagnetic Waves
COMET TECHNOLOGIES USA, Inc.
0 cites
US116704882023
Fast Arc Detecting Match Network
COMET TECHNOLOGIES USA, Inc.
0 cites
US116055272023
Pulsing Control Match Network
COMET TECHNOLOGIES USA, Inc.
0 cites