4 Patents
- US122378402025Detection, Correction, and Compensation of Coupling Effects of Microelectromechanical System (MEMS) Axes of a Two-dimensional Scanning Structure
Infineon Technologies AG
0 cites - US121969502025Driving Signal Parameter Variation for Driving MEMS Mirrors for Synchronization Control and Tuning Lissajous Scanning
Infineon Technologies AG
0 cites - US118357102023Method of Mode Coupling Detection and Damping and Usage for Electrostatic MEMS Mirrors
Infineon Technologies AG
0 cites - US117036812023MEMS Devices Comprising Spring Element and Comb Drive and Associated Production Methods
Infineon Technologies AG
0 cites