Patents/Inventors

Stefan Piehler

StuttgartDE4 patents

3 Patents

US125986882026
EUV Excitation Light Source and Euv Light Source
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GmbH
0 cites
US120076932024
Laser Focussing Module
Trumpf Lasersystems For Semiconductor Manufacturing GmbH
0 cites
US119687672024
EUV Light Source with a Separation Device
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GmbH
0 cites