Patents/Inventors

Stefan Lippoldt

AalenDE3 patents

3 Patents

US125470802026
Field Facet System and Lithography Apparatus
Carl Zeiss SMT GmbH
0 cites
US123728832025
Field Facet for a Field Facet Mirror of a Projection Exposure System
Carl Zeiss SMT GmbH
0 cites
US123531372025
Field Facet System and Lithography Apparatus
Carl Zeiss SMT GmbH
0 cites