Patents/Inventors

Stefan Hunsche

Santa Clara, CAUS10 patents

11 Patents

US123862682025
Method for Calibrating Simulation Process Based on Defect-based Process Window
ASML NETHERLANDS B.V.
0 cites
US123604612025
Identification of Hot Spots or Defects by Machine Learning
ASML NETHERLANDS B.V.
0 cites
US122711142025
Method and Apparatus for Predicting Substrate Image
ASML NETHERLANDS B.V.
0 cites
US122288622025
Selection of Measurement Locations for Patterning Processes
ASML NETHERLANDS B.V.
0 cites
US121893072025
Metrology Data Correction Using Image Quality Metric
ASML NETHERLANDS B.V.
0 cites
US121415072024
Process Window Optimizer
ASML NETHERLANDS B.V.
0 cites
US120929652024
Process Variability Aware Adaptive Inspection and Metrology
ASML NETHERLANDS B.V.
0 cites
US118222552023
Process Window Based on Defect Probability
ASML Netherlands B.V.
0 cites
US117200292023
Method and Apparatus for Image Analysis
ASML NETHERLANDS B.V.
0 cites
US116812292023
Selection of Measurement Locations for Patterning Processes
ASML Netherlands B.V.
0 cites
US116690202023
Method and Apparatus for Pattern Fidelity Control
ASML NETHERLANDS B.V.
0 cites