Patents/Inventors

Stefan Eyring

WeilburgDE6 patents

7 Patents

US124446282025
Image Modeling-assisted Contour Extraction
KLA CORPORATION
0 cites
US120853852024
Design-assisted Large Field of View Metrology
KLA Corporation
0 cites
US120558592024
Overlay Mark Design for Electron Beam Overlay
0 cites
US118942142024
Detection and Correction of System Responses in Real-time
KLA CORPORATION
0 cites
US118625242024
Overlay Mark Design for Electron Beam Overlay
0 cites
US117200312023
Overlay Design for Electron Beam and Scatterometry Overlay Measurements
KLA Corporation
0 cites
US117037672023
Overlay Mark Design for Electron Beam Overlay
0 cites