Patents/Inventors

Stefan Eder-kapl

ViennaAT2 patents

3 Patents

US126146952026
Multi-beam Pattern Definition Device
IMS Nanofabrication GmbH
0 cites
US125000602025
Electromagnetic Lens
IMS Nanofabrication GmbH
0 cites
US121547562024
Beam Pattern Device Having Beam Absorber Structure
IMS Nanofabrication GmbH
0 cites