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Inventors
Stefan Carolus Jacobus Antonius Keij
Breda
NL
7 patents
3 Patents
US12618667
2026
Measurement Apparatus
ASML NETHERLANDS B.V.
0 cites
US12032299
2024
Metrology Method and Associated Metrology and Lithographic Apparatuses
ASML NETHERLANDS B.V.
0 cites
US11874103
2024
Measurement Apparatus
ASML NETHERLANDS B.V.
0 cites