Patents/Inventors

Ssu-yu Chen

New TaipeiTW7 patents

8 Patents

US123796752025
Extreme Ultraviolet Lithography System
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US122822622025
Method for Controlling Extreme Ultraviolet Light
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US122355942025
Method for Performing Lithography Process, Light Source, and EUV Lithography System
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122073812025
Extreme Ultraviolet Lithography System with Heated Tin Vane Bucket Having a Heated Cover
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US121305562024
Plasma Position Control for Extreme Ultraviolet Lithography Light Sources
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US120558652024
Extreme Ultraviolet Lithography System
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US117037692023
Light Source, EUV Lithography System, and Method for Performing Circuit Layout Patterning Process
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US116505082023
Plasma Position Control for Extreme Ultraviolet Lithography Light Sources
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites