Patents/Inventors

Sriskantharajah Thirunavukarasu

SingaporeSG4 patents

5 Patents

US124379992025
Methods and Apparatus for Mask Patterning Debris Removal
APPLIED MATERIALS, Inc.
0 cites
US120681592024
Methods and Apparatus for Mask Patterning Debris Removal
APPLIED MATERIALS, Inc.
0 cites
US118716672024
Methods and Apparatus for Warpage Correction
APPLIED MATERIALS, Inc.
0 cites
US117394112023
Lattice Coat Surface Enhancement for Chamber Components
Applied Materials, Inc.
0 cites
US117215832023
Mainframe-less Wafer Transfer Platform with Linear Transfer System for Wafer Processing Modules
Applied Materials, Inc.
0 cites