Patents/Inventors

Srinivasa Rao Yedla

BangaloreIN19 patents

16 Patents

US125097562025
Reduced Substrate Process Chamber Cavity Volume
Applied Materials, Inc.
0 cites
US125060202025
Substrate Processing Module and Method of Moving a Workpiece
Applied Materials, Inc.
0 cites
US123477192025
Floating Pin for Substrate Transfer
APPLIED MATERIALS, Inc.
0 cites
US122665512025
Apparatus, System, and Method for Non-contact Temperature Monitoring of Substrate Supports
Applied Materials, Inc.
0 cites
US122179822025
Isolated Volume Seals and Method of Forming an Isolated Volume Within a Processing Chamber
Applied Materials, Inc.
0 cites
US121953142025
Cathode Exchange Mechanism to Improve Preventative Maintenance Time for Cluster System
Applied Materials, Inc.
0 cites
US120805712024
Substrate Processing Module and Method of Moving a Workpiece
APPLIED MATERIALS, Inc.
0 cites
US120438962024
Symmetric Pump Down Mini-volume with Laminar Flow Cavity Gas Injection for High and Low Pressure
0 cites
US120026682024
Thermal Management Hardware for Uniform Temperature Control for Enhanced Bake-out for Cluster Tool
APPLIED MATERIALS, Inc.
0 cites
US119553552024
Isolated Volume Seals and Method of Forming an Isolated Volume Within a Processing Chamber
APPLIED MATERIALS, Inc.
0 cites
US118173312023
Substrate Holder Replacement with Protective Disk During Pasting Process
Applied Materials, Inc.
0 cites
US117495422023
Apparatus, System, and Method for Non-contact Temperature Monitoring of Substrate Supports
Applied Materials, Inc.
0 cites
US116742272023
Symmetric Pump Down Mini-volume with Laminar Flow Cavity Gas Injection for High and Low Pressure
Applied Materials, Inc.
0 cites
US116462172023
Transfer Apparatus and Substrate-supporting Member
APPLIED MATERIALS, Inc.
0 cites
US116107992023
Electrostatic Chuck Having a Heating and Chucking Capabilities
Applied Materials, Inc.
0 cites
US116005072023
Pedestal Assembly for a Substrate Processing Chamber
APPLIED MATERIALS, Inc.
0 cites