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Inventors
Sriharish Srinivasan
Bangalore
IN
5 patents
5 Patents
US12546003
2026
Atomic Layer Deposition Part Coating Chamber
Applied Materials Inc.
0 cites
US12288677
2025
Vertically Adjustable Plasma Source
Applied Materials, Inc.
0 cites
US12110585
2024
Process Chamber and Exhaust Liner System Therefor
APPLIED MATERIALS, Inc.
0 cites
US11705312
2023
Vertically Adjustable Plasma Source
Applied Materials, Inc.
0 cites
US11581213
2023
Susceptor Wafer Chucks for Bowed Wafers
APPLIED MATERIALS, Inc.
0 cites