3 Patents
- US124544912025Nitride Piezoelectric Body and MEMS Device Using Same
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
0 cites - US119996152024Nitride Piezoelectric Body and MEMS Device Using Same
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
0 cites - US119689022024Piezoelectric Body and MEMS Device Using Same
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
0 cites