Soya Todo

3 Patents

• US125735922026

  Plasma Processing Method and Plasma Processing Apparatus

  Tokyo Electron Limited

  0 cites
• US125623522026

  Prediction Method and Information Processing Apparatus for Predicting the Process Result in a Plasma Etching Process

  TOKYO ELECTRON LIMITED

  0 cites
• US125487442026

  Plasma Processing Apparatus, Control Method, and Storage Medium for Suppressing Deterioration Effects from Wear of an Edge Ring

  TOKYO ELECTRON LIMITED

  0 cites