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Inventors
Souichi Katagiri
Tokyo
JP
1 patent
2 Patents
US11929230
2024
Electron Source and Charged Particle Beam Device
HITACHI HIGH-TECH CORPORATION
0 cites
US11894211
2024
Electron Beam Apparatus and Method for Controlling Electron Beam Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites