Patents/Inventors

Sosuke Osawa

TokyoJP3 patents

4 Patents

US123728692025
Method for Forming Resist Pattern and Radiation-sensitive Resin Composition
JSR CORPORATION
0 cites
US117452162023
Method for Producing Film
JSR CORPORATION
0 cites
US116870032023
Negative Resist Pattern-forming Method, and Composition for Upper Layer Film Formation
JSR CORPORATION
0 cites
US116034592023
Resin Composition and Method of Forming Resist Pattern
JSR CORPORATION
0 cites