Patents/Inventors

Soonmok Ha

Suwon-siKR3 patents

3 Patents

US123879332025
Method for Forming Photoresist Pattern and Method for Forming Pattern on a Substrate
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117684322023
Reflective Mask and Method for Manufacturing a Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117336012023
EUV Photomask and Method of Forming Mask Pattern Using the Same
Samsung Electronics Co., Ltd.
0 cites