Song-moon Suh

7 Patents

• US122494942025

  Remote Plasma Cleaning of Chambers for Electronics Manufacturing Systems

  Applied Materials, Inc.

  0 cites
• US121691632024

  Detection of Surface Particles on Chamber Components with Carbon Dioxide

  Applied Materials, Inc.

  0 cites
• US119329342024

  Method for Particle Removal from Wafers Through Plasma Modification in Pulsed PVD

  Applied Materials, Inc.

  0 cites
• US119329502024

  Organic Contamination Free Surface Machining

  Applied Materials, Inc.

  0 cites
• US118547732023

  Remote Plasma Cleaning of Chambers for Electronics Manufacturing Systems

  Applied Materials, Inc.

  0 cites
• US118154362023

  Detection of Surface Particles on Chamber Components with Carbon Dioxide

  Applied Materials, Inc.

  0 cites
• US115552502023

  Organic Contamination Free Surface Machining

  Applied Materials, Inc.

  0 cites