Patents/Inventors

Sjoerd Frans De Vries

EindhovenNL6 patents

2 Patents

US126191652026
Electrostatic Holder, Object Table and Lithographic Apparatus
ASML Netherlands B.V.
0 cites
US123325702025
Lithographic System Provided with a Deflection Apparatus for Changing a Trajectory of Particulate Debris
ASML Netherlands B.V.
0 cites