Patents/Inventors

Siyuan Tian

Newark, CAUS14 patents

6 Patents

US126047032026
Wafer Chuck with Thermal Tuning Cavity Features
Lam Research Corporation
0 cites
US123082652025
RF Immune Sensor Probe for Monitoring a Temperature of an Electrostatic Chuck of a Substrate Processing System
Lam Research Corporation
0 cites
US121548142024
Long-life Extended Temperature Range Embedded Diode Design for Electrostatic Chuck with Multiplexed Heaters Array
LAM RESEARCH CORPORATION
0 cites
US120778622024
Connector for Substrate Support with Embedded Temperature Sensors
LAM RESEARCH CORPORATION
0 cites
US118697942024
Long-life Extended Temperature Range Embedded Diode Design for Electrostatic Chuck with Multiplexed Heaters Array
Lam Research Corporation
0 cites
US117911892023
Reflectometer to Monitor Substrate Movement
Lam Research Corporation
0 cites