Patents/Inventors

Siyao Luan

Phoenix, AZUS2 patents

3 Patents

US123548932025
Fixture and Method for Determining Position of a Target in a Reaction Chamber
ASM IP Holding B.V.
0 cites
USD10316762024
Combined Susceptor, Support, and Lift System
ASM IP Holding B.V.
0 cites
US117641012023
Susceptor for Semiconductor Substrate Processing
ASM IP Holding, B.V.
0 cites