Patents/Inventors

Sivananda Krishnan Kanakasabapathy

Pleasanton, CAUS11 patents

7 Patents

US126222322026
Advanced Self Aligned Multiple Patterning Using Tin Oxide
Lam Research Corporation
0 cites
US126069052026
Chamfer-less via Integration Scheme
Lam Research Corporation
0 cites
US125326752026
Core Removal
Lam Research Corporation
0 cites
US122781252025
Integrated Dry Processes for Patterning Radiation Photoresist Patterning
Lam Research Corporation
0 cites
US121835892024
Tin Oxide Mandrels in Patterning
Lam Research Corporation
0 cites
US121836042024
Integrated Dry Processes for Patterning Radiation Photoresist Patterning
Lam Research Corporation
0 cites
US119878762024
Chamfer-less via Integration Scheme
Lam Research Corporation
0 cites