Patents/Inventors

Siva Krishnan Kanakasabapathy

Pleasanton, CAUS2 patents

3 Patents

US122482522025
Bubble Defect Reduction
Lam Research Corporation
0 cites
US121911252025
Removing Metal Contamination from Surfaces of a Processing Chamber
Lam Research Corporation
0 cites
US118428882023
Removing Metal Contamination from Surfaces of a Processing Chamber
Lam Research Corporation
0 cites